|Vacuum Process Monitoring Systems||UGAPM ... from $30,950|
|UGAPM Series — Up to 300 amu gas analyzers|
|(Click to enlarge)|
|UGAPM Series Process Monitors
|The UGAPM Series Process Monitoring Systems are modern mass spectrometers designed for the analysis of process gases. They operate from 20 Torr to 1 mTorr.The inlet continuously samples gases at low flow rates (about 5x10-5 mbar L/sec) making the instrument ideal for on-line analysis.|
| Related Products
> QMS Series Gas Analyzers
> RGA Residual Gas Analyzer
> CIS Closed Ion Source Analyzer
> PPR Gas Analyzers
> UGA Universal Gas Analyzers
UGAPM vs. PPR
UGAPM Series Process Monitoring Systems
The UGAPM Series Process Monitoring Systems are modern mass spectrometers designed for the analysis of process gases. They operate from 20 Torr to 1 mTorr. The inlet continuously samples gases at low flow rates (about 5x10-5 mbar L/sec) making the instrument ideal for on-line analysis.
UGAPM applications include CVD/PECVD/RIE/LPCVD/MOCVD, vacuum coating/ plasma etching, evaporation, sputter deposition, vacuum heat treatment, target burn-in, leak detection/ virtual leaks/ desorption, contaminatin studies, small volume analysis (0.1 mL range), etc.
These analyzers are also simple to operate and maintain. All the components can be controlled from the front-panel or a remote computer. In UGAPM systems, a SS capillary of 1/16” or 1/8” OD is used to accommodate mid-vacuum sampling. With this configuration, there is almost zero dead volume between the process chamber and the analyzer.
Principle of operation
The UGAPM system uses a single stage capillary pressure reducing inlet to sample gases from 1 mTorr to 20 Torr. After the pressure is reduced to around 10-6 Torr, the gas stream is sent to a mass spectrometer (residual gas analyzer - RGA) which measures the concentration of each mass of interest.
The UGAPM Windows software provides a graphical user interface for complex graphing and data analysis. The software also allows remote control of the system’s valves, heaters and pumps.
An optional multiple inlet valve is available with two possible configurations. One is the multichannel configuration, which may be applied for one specific sample pressure at various places. The other is the multi-range configuration, which may be applied for various ranges of the sample pressure.
Using your UGAPM Process Monitor
The UGAPM system can be controlled from the front-panel or from a computer. A choice of manual or auto-control of all system components is provided.
Data is measured and displayed using the UGAPM software. The intuitive user interface allows measurements to be made quickly and easily. Data is captured and displayed in real-time, or scheduled for acquisition at a specified time.
Features include analog and histogram scan modes, pressure vs. time plots, leak detection, gas library, and on-line help.
RGA parameters can also be controlled and monitored through a high-level ASCII command set. Standard RS-232 and Ethernet interfaces are used as the data link to your PC.
The UGAPM Analyzers offer the best value of any system currently available. They provide more performance, better features, and are priced well below the competition.
|UGAPM Series Process Monitors|
|Type||Stainless steel capillary, two extra 2-3/4" CF ports|
|Flowrate||10-4 to 10-5 Torr-L/sec at application pressures|
|Pressure||selectable from 1 X 10-3 mbar to 15 mbar
|Detector||Faraday cup and electron multiplier|
|Range||100, 200 or 300 atomic mass units (amu)|
|Resolution||Better than 0.5 amu at 10 % of peak height|
|Detection limit||<10 ppm with Faraday cup detector, <1 ppm with electron multiplier|
|Operating pressure||10-4 mbar for FC, 10-6 mbar for CDEM|
|Sample Inlet||1/16" or 1/8" Swagelok fitting|
|Exhaust||1/4" Tygon tube adapter|
|Computer||Ethernet or RS-232C, DB9 connector|
|Power||3 pin grounded cable|
|Software||Windows application. Controls UGAPM system including RGA.|
|Pumps||Hybrid turbomolecular/drag pump, 81 liter/s
Ultimate pressure 2 x 10-9 mbar
Diaphragm pump with ultimate pressure less than 7 mbar
Protection class IP44
|Construction||SS304 and SS316|
|Seals||Viton®, buna-N, and nitrile butyl rubber, copper gasket|
|Startup time||8 minutes from full stop|
|Max. ambient temp.||35 °C|
|Power requirement||<600 W, either 110 V / 60 Hz or 220 V / 50 Hz (not field selectable)|
|Dimensions||12 " × 11 " × 27 " (WHL)|
|Warranty||One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.|